Elli-SEUN (Ellipsometer) > Spectroscopic Ellipsometer

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Ellipso Technology
Spectroscopic Ellipsometer

Elli-SEUN (Ellipsometer)

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Spectroscopic Ellipsometer(SE), the industry standard technology that enables one to accurately measure thickness and optical constants of thin film, simultaneously, is used for characterization of a variety of materials (e.g., dielectrics, semiconductors, organics, etc.) including AR coatings, OLED, and low(high)-materials.


◈FEATURE

   1.Easy Operation & Fast Measurement
   2.High Reproducibility
   3.User-Friendly Operation
   4.Non-contact & Non-destructive
   5.Multi-Layer Measurement
   6. Wide Spectral Range

 

◈SPECIFICATION

​ Measuring constants

 Film thickness, n, k vs λ

 Thickness range

 sub Å ~ 10 μm (depends on film type)

 Wavelength range

 240 ~ 1700 nm

 Option of Spectral Range

  - (Duv:193nm, IR:900nm~ 2,200nm)

 Throughput

 Normal mode(~10 sec)

 fast mode (1~3 sec) per point(depends on film type)

 Beam Spot-size

 1.5 mm  (Optional 100μm, 50 μm, 20 μm)

 Angle of incidence

 45°~90° (Step 5°, manual type)

 Number of layers

 Up to ten(10) layers (depends on film type)

 Repeatability

 (3σ) ±0.3 Å on 10 times measurement

 Application

 Semiconductors, Display, Optical Coatings, Chemistry/Biology,   

 Conductive Organics, Photovoltaics etc.

  • Thickness of Dielectrics, Semiconductors, Polymers,

  • Supporting Backside/Front side Reflections,

  • Very Thin Films, Very Thick Films

  • Variable Substrates (Silicon, GaAs, , Al, Steel, Glass, Al2O3, PC, PET, Polymer films and Others)

 Providing features

 Refractive Index, Extinction coefficient and optical band gap

 Film density and composition, Material's dispersion function library

 User defined models capability, Data import & export functions, -

 Extendable library



 

◈OPTION  

   1.Auto Mapping Stage (150 mm, 200 mm, 300 mm, Customized Size)
   2.Option of Spectral Range (UV: 193 nm ~ 1,050 nm), (IR:, 900nm~ 2,200nm)
   3.Micro Spot Option (100 μm, 50 μm, 25 μm)
   4.Auto Alignment System, Automated Variable Angle of Incidence (45°~ 90°)